THERMAL AND WET PROCESSES

 8 Furnaces are in operation in a class 100 clean room, we are processing very thick thermal oxide for planar wave guide on silicon.

  • 4, 5 and 6 inches wafers
  • 8 inches wafers under development

We are also able to process CVD and doping.

 

FURNACES

VEGATEC designs and manufactures furnaces including :
  • Gas cabinet
  • Gas panel
  • Thermal cabinet
  • Loading station
  • Process controller
We are building small unit for laboratory or large furnace for production volume and custom equipment.
These furnaces compatible with 4, 5, 6, and 8 inches wafers are working in class 10, 100 clean room.
 
   

WET BENCHES MANUFACTURING

    
   

UHP GAS AND LIQUID

VEGATEC designs and manufactures gas panels and gas cabinets with ultra high purity specifications and controls.
  • Electropolished stainless steel piping (Ra = 0.2 Microns).
  • VCR fitting.
  • Orbital welding.
  • Premanufacturing in class 100 clean room.
  • Helium leak detection.
  • Integration of pneumatic valves, pressure regulator, massflow controllers, and gas detectors.
        Class 100 clean room
 

VACUUM TECHNOLOGIES

VEGATEC is integrating mechanical, turbomolecular and cryogenic pumps.

Complete systems from primary vacuum to ultra high vacuum are built including pressure and vacuum cycle management.

 

TOXIC GAS ABATMENT ENGINEERING

We are working on the following technics for toxic gas abatment.
  • Hydrolisis
  • Pyrolisis
  • Plasma
VEGATEC proposes :
  • Research and development
  • Custom equipment
  • Gas analysis by mass spectrometry

   Tube plasma

 
     

PROCESS CONTROL

 

 
 

GAS ANALYSES

 

 
     

AUTOMATION